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Critical Issues in Scanning Electron Microscope Metrology : September-October 1994

Critical Issues in Scanning Electron Microscope Metrology : September-October 1994 - 94 edition

Critical Issues in Scanning Electron Microscope Metrology : September-October 1994 - 94 edition

ISBN13: 9780788115523

ISBN10: 0788115529

Critical Issues in Scanning Electron Microscope Metrology : September-October 1994 by Michael T. Postek - ISBN 9780788115523
Edition: 94
Copyright: 1994
Publisher: Diane Publishing Co.
Published: 1994
International: No
Critical Issues in Scanning Electron Microscope Metrology : September-October 1994 by Michael T. Postek - ISBN 9780788115523

ISBN13: 9780788115523

ISBN10: 0788115529

Edition: 94

Summary

Optical microscopy, scanning electron microscopy & the various forms of scanning probe microscopies are major microscopical techniques used to make measurements during the manufacture of integrated circuits. This report reviews the current state of SEM metrology in light of the many recent improvements. Charts & tables.

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