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Critical Issues in Scanning Electron Microscope Metrology : September-October 1994 - 94 edition

Critical Issues in Scanning Electron Microscope Metrology : September-October 1994 (ISBN10: 0788115529; ISBN13: 9780788115523)
ISBN13: 978-0788115523
ISBN10: 0788115529

Summary: Optical microscopy, scanning electron microscopy & the various forms of scanning probe microscopies are major microscopical techniques used to make measurements during the manufacture of integrated circuits. This report reviews the current state of SEM metrology in light of the many recent improvements. Charts & tables.

Edition/Copyright: 94
Cover: Other Format
Publisher: Diane Publishing Co.
Published: 12/28/1994
International: No



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