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Critical Issues in Scanning Electron Microscope Metrology : September-October 1994

Critical Issues in Scanning Electron Microscope Metrology : September-October 1994 - 94 edition

ISBN13: 978-0788115523

Cover of Critical Issues in Scanning Electron Microscope Metrology : September-October 1994 94 (ISBN 978-0788115523)
ISBN13: 978-0788115523
ISBN10: 0788115529
Cover type:
Edition/Copyright: 94
Publisher: Diane Publishing Co.
Published: 1994
International: No

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Critical Issues in Scanning Electron Microscope Metrology : September-October 1994 - 94 edition

ISBN13: 978-0788115523

Michael T. Postek

ISBN13: 978-0788115523
ISBN10: 0788115529
Cover type:
Edition/Copyright: 94
Publisher: Diane Publishing Co.

Published: 1994
International: No
Summary

Optical microscopy, scanning electron microscopy & the various forms of scanning probe microscopies are major microscopical techniques used to make measurements during the manufacture of integrated circuits. This report reviews the current state of SEM metrology in light of the many recent improvements. Charts & tables.

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