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Semiconductor Material and Device Characterization

Semiconductor Material and Device Characterization - 3rd edition

ISBN13: 978-0471739067

Cover of Semiconductor Material and Device Characterization 3RD 06 (ISBN 978-0471739067)
ISBN13: 978-0471739067
ISBN10: 0471739065
Cover type:
Edition/Copyright: 3RD 06
Publisher: John Wiley & Sons, Inc.
Published: 2006
International: No
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Semiconductor Material and Device Characterization - 3RD 06 edition

ISBN13: 978-0471739067

Dieter K. Schroder

ISBN13: 978-0471739067
ISBN10: 0471739065
Cover type:
Edition/Copyright: 3RD 06
Publisher: John Wiley & Sons, Inc.

Published: 2006
International: No
Summary

Semiconductor Material and Device Characterizationis the only book on the market devoted to the characterization techniques used by the modern semiconductor industry to measure diverse semiconductor materials and devices. It covers the full range of electrical and optical characterization methods while thoroughly treating the more specialized chemical and physical techniques.

In the third edition, Professor Schroder has rewritten parts of each chapter and added two new chapters (Charge Based Measurements and Failure Analysis and Reliability), redrawn and updated most figures, and included new problems and approximately 100 new references.

  • New end of chapter problems
  • Outdated figures have been redone and replaced with current data
  • Up-to-date bibliography with over 1400 references
  • Professor Schroder is recognized as the authority in the field of semiconductor characterization

Table of Contents

1. Resistivity.
2. Carrier and Doping Density.
3. Contact Resistance and Schottky Barriers.
4. Series Resistance, Channel Length and Width, and Threshold Voltage.
5. Defects.
6. Oxide and Interface Trapped Charges, Oxide Integrity.
7. Carrier Lifetime.
8. Mobility.
9. Charge-Based and Probe Characterization.
10. Optical Characterization.
11. Chemical and Physical Characterization.
12. Reliability and Failure Analysis

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